论文标题
可见的高效率虚拟现实元词的可见的高索引原子层 - 聚合物混合元面
Scalably manufactured high-index atomic layer-polymer hybrid metasurfaces for high-efficiency virtual reality metaoptics in the visible
论文作者
论文摘要
金属镜具有较高的光调节性能，并具有亚微米尺度的厚度，是常规笨重的折射镜头的合适替代品。但是，制造限制（例如高成本，低通量和小图案区域）阻碍了他们的批量生产。在这里，我们证明了使用氟化物浸入式扫描仪和晶圆尺度的纳米印刷光刻的低成本，高通量和大量可见金属的质量产生。一旦印刷了12英寸的主邮票，就可以制造数百厘米尺度的金属。为了增强光限制，印刷的跨表面被高指数膜薄薄，从而导致转化效率的急剧提高。作为概念的证明，制造的金属人证明了具有超厚度的虚拟现实设备的原型。
Metalenses, which exhibit superior light-modulating performance with sub-micrometer-scale thicknesses, are suitable alternatives to conventional bulky refractive lenses. However, fabrication limitations, such as a high cost, low throughput, and small patterning area, hinder their mass production. Here, we demonstrate the mass production of low-cost, high-throughput, and large-aperture visible metalenses using an argon fluoride immersion scanner and wafer-scale nanoimprint lithography. Once a 12-inch master stamp is imprinted, hundreds of centimeter-scale metalenses can be fabricated. To enhance light confinement, the printed metasurface is thinly coated with a high-index film, resulting in drastic increase of conversion efficiency. As a proof of concept, a prototype of a virtual reality device with ultralow thickness is demonstrated with the fabricated metalens.
