论文标题

INSB纳米片/HBN/石墨异质结构设备的制造和表征

Fabrication and characterization of InSb nanosheet/hBN/graphite heterostructure devices

论文作者

Zhang, Li, Chen, Yuanjie, Pan, Dong, Huang, Shaoyun, Zhao, Jianhua, Xu, H. Q.

论文摘要

半导体INSB纳米片/六角形氮化硼(HBN)/石墨三层均制造,并实现和表征了由三层的单门和双门设备。在三层设备中使用的INSB纳米片是外延生长,独立的,锌蓝的晶体,并以微米的侧向尺寸。 HBN和石墨片是通过去角质获得的。每个三层均是通过使用自制的对齐堆叠/传输设置将INSB纳米片依次堆叠在HBN薄片上和石墨薄片上来制作的。制造的单门和双门设备的特征是电气和/或磁铁竞争测量值。在所有这些设备中,石墨和HBN薄片被用作底部门和栅极介电。制造的单个底栅场效应设备的测量表明,该设备中的Insb纳米片具有〜7300 cm $^2 $^2 $^2 $^2 $ V $^{ - 1} $ S $^{ - 1} $^{ - 1} $,低门的滞后率和一个低门的均值为1.9 k。耦合到INSB纳米片通道,因此可以有效调整纳米片通道传导。提取了霍尔棒设备的INSB纳米片的电子厅的移动性大于1.1 $ \ times $ 10 $^4 $ cm $^2 $^2 $ v $^{ - 1} $ s $^{ - 1} $ s $^{ - 1} $,在纸电子密度〜6.1 $ \ 6.1 $ \ times $ 10 $ 10 $^{11} $^{11} $ CM $ CM $ CM $^exution and and and exution and and and and 1.-1 k和1.-1 k. Shubnikov-de Haas振荡。

Semiconductor InSb nanosheet/hexagonal boron nitride (hBN)/graphite trilayers are fabricated, and single- and double-gate devices made from the trilayers are realized and characterized. The InSb nanosheets employed in the trilayer devices are epitaxially grown, free-standing, zincblende crystals and are in micrometer lateral sizes. The hBN and graphite flakes are obtained by exfoliation. Each trilayer is made by successively stacking an InSb nanosheet on an hBN flake and on a graphite flake using a home-made alignment stacking/transfer setup. The fabricated single- and double-gate devices are characterized by electrical and/or magnetotransport measurements. In all these devices, the graphite and hBN flakes are employed as the bottom gates and the gate dielectrics. The measurements of a fabricated single bottom-gate field-effect device show that the InSb nanosheet in the device has an electron field-effect mobility of ~7300 cm$^2$V$^{-1}$s$^{-1}$ and a low gate hysteresis of ~0.05 V at 1.9 K. The measurements of a double-gate Hall-bar device show that both the top and the bottom gate exhibit strong capacitive couplings to the InSb nanosheet channel and can thus tune the nanosheet channel conduction effectively. The electron Hall mobility in the InSb nanosheet of the Hall-bar device is extracted to be larger than 1.1$\times$10$^4$ cm$^2$V$^{-1}$s$^{-1}$ at a sheet electron density of ~6.1$\times$10$^{11}$ cm$^{-2}$ and 1.9 K and, thus, the device exhibits well-defined Shubnikov-de Haas oscillations.

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