论文标题

CMOS硅中的退化光学参数扩增

Degenerate optical parametric amplification in CMOS silicon

论文作者

Heydari, David, Catuneanu, Mircea, Ng, Edwin, Gray Jr., Dodd J., Hamerly, Ryan, Mishra, Jatadhari, Jankowski, Marc, Fejer, M. M., Jamshidi, Kambiz, Mabuchi, Hideo

论文摘要

硅是光子学的共同材料,因为其在电信和中波IR频段中具有良好的光学特性,并且与广泛的互补金属氧化物半导体(CMOS)铸造工艺的兼容性。晶反演对称性排除了从天生表现出二阶非线性光学过程的硅。在这项工作中,我们以硅光子学的最新作品为基础,这些工作使用大偏置字段打破了这种材料对称性,从而启用了$χ^{(2)} $互动。使用这种方法,我们证明了第二次谐波的生成(正常化的效率为$ 0.2 \,\%\,\ Mathrm {w^{ - 1} cm^{ - 2}} $),据我们所知,我们所知道的是,第一个退化$χ^{(2)} $ optical pommetical pametical pommetical pommetric pomitepric pametric pametric gooper a $ 0.02 $ 3 \,\ MATHRM {MW} $在芯片上使用$ 1196 \,\ MATHRM {nm} $的泵波长,使用在CMOS兼容的商业铸造厂制造的硅 - 隔离器波导。我们希望这项技术通过利用广泛的CMOS制造生态系统来整合新型非线性光学设备,例如光学参数放大器,振荡器和频率转换器。

Silicon is a common material for photonics due to its favorable optical properties in the telecom and mid-wave IR bands, as well as compatibility with a wide range of complementary metal-oxide semiconductor (CMOS) foundry processes. Crystalline inversion symmetry precludes silicon from natively exhibiting second-order nonlinear optical processes. In this work, we build on recent work in silicon photonics that break this material symmetry using large bias fields, thereby enabling $χ^{(2)}$ interactions. Using this approach, we demonstrate both second-harmonic generation (with a normalized efficiency of $0.2\,\%\,\mathrm{W^{-1} cm^{-2}}$) and, to our knowledge, the first degenerate $χ^{(2)}$ optical parametric amplifier (with relative gain of $0.02\,\mathrm{dB}$ using $3\,\mathrm{mW}$ of pump power on-chip at a pump wavelength of $1196\,\mathrm{nm}$) using silicon-on-insulator waveguides fabricated in a CMOS-compatible commercial foundry. We expect this technology to enable the integration of novel nonlinear optical devices such as optical parametric amplifiers, oscillators, and frequency converters into large-scale, hybrid photonic-electronic systems by leveraging the extensive ecosystem of CMOS fabrication.

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