论文标题
CMOS硅中的退化光学参数扩增
Degenerate optical parametric amplification in CMOS silicon
论文作者
论文摘要
硅是光子学的共同材料,因为其在电信和中波IR频段中具有良好的光学特性,并且与广泛的互补金属氧化物半导体(CMOS)铸造工艺的兼容性。晶反演对称性排除了从天生表现出二阶非线性光学过程的硅。在这项工作中,我们以硅光子学的最新作品为基础,这些工作使用大偏置字段打破了这种材料对称性,从而启用了$χ^{(2)} $互动。使用这种方法,我们证明了第二次谐波的生成(正常化的效率为$ 0.2 \,\%\,\ Mathrm {w^{ - 1} cm^{ - 2}} $),据我们所知,我们所知道的是,第一个退化$χ^{(2)} $ optical pommetical pametical pommetical pommetric pomitepric pametric pametric gooper a $ 0.02 $ 3 \,\ MATHRM {MW} $在芯片上使用$ 1196 \,\ MATHRM {nm} $的泵波长,使用在CMOS兼容的商业铸造厂制造的硅 - 隔离器波导。我们希望这项技术通过利用广泛的CMOS制造生态系统来整合新型非线性光学设备,例如光学参数放大器,振荡器和频率转换器。
Silicon is a common material for photonics due to its favorable optical properties in the telecom and mid-wave IR bands, as well as compatibility with a wide range of complementary metal-oxide semiconductor (CMOS) foundry processes. Crystalline inversion symmetry precludes silicon from natively exhibiting second-order nonlinear optical processes. In this work, we build on recent work in silicon photonics that break this material symmetry using large bias fields, thereby enabling $χ^{(2)}$ interactions. Using this approach, we demonstrate both second-harmonic generation (with a normalized efficiency of $0.2\,\%\,\mathrm{W^{-1} cm^{-2}}$) and, to our knowledge, the first degenerate $χ^{(2)}$ optical parametric amplifier (with relative gain of $0.02\,\mathrm{dB}$ using $3\,\mathrm{mW}$ of pump power on-chip at a pump wavelength of $1196\,\mathrm{nm}$) using silicon-on-insulator waveguides fabricated in a CMOS-compatible commercial foundry. We expect this technology to enable the integration of novel nonlinear optical devices such as optical parametric amplifiers, oscillators, and frequency converters into large-scale, hybrid photonic-electronic systems by leveraging the extensive ecosystem of CMOS fabrication.