论文标题
线场连贯的传感与LED照明
Line-field Coherent Sensing with LED Illumination
论文作者
论文摘要
我们描述了一种使用标准发光二极管（LED）照明和互补金属氧化物 - 氧化二一个（CMOS）图像传感器的基于低碳干涉测量法的方法。线场照明策略允许同时测量太空中的许多点。使用多种目标实现并证明了微米尺度的准确性和分辨率。
We describe a method of low-coherence interferometry based optical profilometry using standard light-emitting diode (LED) illumination and complementary metal-oxide-semiconductor (CMOS) image sensors. A line-field illumination strategy allows for the simultaneous measurement of many points in space. Micron scale accuracy and resolution are achieved and demonstrated using a variety of targets.
