论文标题
电阻加载的共面波导，用于微波测量的诱导载体
Resistively loaded coplanar waveguide for microwave measurements of induced carriers
论文作者
论文摘要
我们描述了Coplanar波导的使用，其插槽充满了电阻膜，电阻载有Coplanar波导（RLCPW）来测量二维电子系统（2DES）。应用于托管2DE的样品的RLCPW提供了用作栅极的均匀金属表面，以控制2DE的面积电荷密度。作为对该技术的演示，我们介绍了在SI MOSFET上进行的测量，并成功将微波传输系数转换为附近2DE的电导率的模型，该模型与RLCPW的电容性耦合。我们还描述了制造RLCPW制造所需的高电阻金属膜的过程。
We describe the use of a coplanar waveguide whose slots are filled with resistive film, a resistively loaded coplanar waveguide (RLCPW), to measure two dimensional electron systems (2DES). The RLCPW applied to the sample hosting the 2DES provides a uniform metallic surface serving as a gate, to control the areal charge density of the 2DES. As a demonstration of this technique we present measurements on a Si MOSFET, and a model that successfully converts microwave transmission coefficients into conductivity of a nearby 2DES capacitively coupled to the RLCPW. We also describe the process of fabricating the highly resistive metal film required for fabrication of the RLCPW.
