论文标题
由低压等离子体来源的射频电场驱动的电子网球
Electron tennis driven by radio-frequency electric fields in low-pressure plasma sources
论文作者
论文摘要
我们对在低压下的射频电压波形激发的电容性耦合等离子体的鞘区域内的电子轨迹进行了详细的分析。鞘内内部的复杂特征以几种物理量确定，这些物理量是由弹跳电子的轨迹在时空变化的电场的影响下雕刻的。开发了一种方法来解释各种特征作为表面过程的函数，并确定不同原点的电子轨迹。
We present a detailed analysis of electron trajectories within the sheath regions of capacitively coupled plasmas excited by radio-frequency voltage waveforms at low pressures. Complex features inside the sheaths are identified in several physical quantities, which are sculptured by the trajectories of the bouncing electrons under the influence of the spatio-temporally varying electric field. A method is developed to explain the generation of the various features as a function of surface processes and to identify the trajectories of electrons of different origin.
