论文标题
MOO $ _3 $纳米片的基于光学的厚度测量
Optical-based thickness measurement of MoO$_3$ nanosheets
论文作者
论文摘要
考虑到三维（2D）三维三氧化物在过去几年中引起了更多关注，这与加快该材料的厚度鉴定相关。我们提供两种快速且无损的方法来评估SIO $ _2 $/SI基板上MOO $ _3 $薄片的厚度。首先，通过对光学显微镜图像中薄片的明显颜色进行定量分析，可以将厚度的第一个近似值以$ \ pm3 $ nm的不确定性进行近似。第二种方法是基于通过微反射测量获得的光学对比光谱的拟合度，该模型具有基于菲涅耳法的模型，该模型提供了$ \ pm2 $ nm的不确定性的准确测量。
Considering that two-dimensional (2D) molybdenum trioxide has acquired more attention in the last few years, it is relevant to speed up thickness identification of this material. We provide two fast and non-destructive methods to evaluate the thickness of MoO$_3$ flakes on SiO$_2$/Si substrates. First, by means of quantitative analysis of the apparent color of the flakes in optical microscopy images, one can make a first approximation of the thickness with an uncertainty of $\pm3$ nm. The second method is based on the fit of optical contrast spectra, acquired with micro-reflectance measurements, to a Fresnel law-based model that provides an accurate measurement of the flake thickness with $\pm2$ nm of uncertainty.
