论文标题

MEMS镜像制造和测试创新空间应用

MEMS Mirror Manufacturing and Testing for Innovative Space Applications

论文作者

Bagolini, A., Boscardin, M., Dell'Agnello, S., Monache, G. Delle, Emilio, M. Di Paolo, Porcelli, L., Salvatori, L., Tibuzzi, M.

论文摘要

在Glare-X的框架(通过Space X的Geodesy通过激光X)项目,由INFN领导,并资助了2019 - 2021年,旨在显着提高太空地理位置,显示了2019年在2019年开展的初步活动,以制造和测试适应性镜子。本特定的文章涉及MRR(调制后反射器)的“候选” MEMS(微电机机械系统)镜子的被动基材的制造和表面质量测量;进一步的出版物将显示活跃的组件。该项目Glare-X已获得INFN 2019 - 2021年的批准:它涉及多个机构,包括其他机构,包括INFN-LNF和FBK。 Glare-X是一项创新的研发活动,其在较大的空间测量目标将涉及以下主题:逆激光器范围(从太空的激光终端到行星的目标),激光范围为碎屑清除和迭代性轨道校正,用于高端tof(飞行时间)的跨度轨道校正和测试,以供高级tof(用于飞行的时间),以供高级运行,以供您使用MR的测试。 Neo(近地球轨道)立方体。这篇具体文章总结了在“候选” MEMS镜子的被动基板上执行的制造和表面质量测量活动,这些活动将被安排到MRR中。最终的主动组件将在2021年实现,这将得益于提出的(和进一步的)测试活动所选择的制造特性,并将为NEO,MOON和MARS设备找到适当的空间应用,例如,例如,合作和主动激光射线散射器,用于激光测定和LaserComm的支持。

In the framework of the GLARE-X (Geodesy via LAser Ranging from spacE X) project, led by INFN and funded for the years 2019-2021, aiming at significantly advance space geodesy, one shows the initial activities carried out in 2019 in order to manufacture and test adaptive mirrors. This specific article deals with manufacturing and surface quality measurements of the passive substrate of 'candidate' MEMS (Micro-Electro-Mechanical Systems) mirrors for MRRs (Modulated RetroReflectors); further publications will show the active components. The project GLARE-X was approved by INFN for the years 2019-2021: it involves several institutions, including, amongst the other, INFN-LNF and FBK. GLARE-X is an innovative R&D activity, whose at large space geodesy goals will concern the following topics: inverse laser ranging (from a laser terminal in space down to a target on a planet), laser ranging for debris removal and iterative orbit correction, development of high-end ToF (Time of Flight) electronics, manufacturing and testing of MRRs for space, and provision of microreflectors for future NEO (Near Earth Orbit) cubesats. This specific article summarizes the manufacturing and surface quality measurements activities performed on the passive substrate of 'candidate' MEMS mirrors, which will be in turn arranged into MRRs. The final active components, to be realized by 2021, will inherit the manufacturing characteristics chosen thanks to the presented (and further) testing campaigns, and will find suitable space application to NEO, Moon, and Mars devices, like, for example, cooperative and active lidar scatterers for laser altimetry and lasercomm support.

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