论文标题
实验室放牧X射线荧光光谱作为研究子纳米CRSC多层水窗光学的分析工具
Laboratory grazing-incidence X-ray fluorescence spectroscopy as an analytical tool for the investigation of sub-nanometer CrSc multilayer water window optics
论文作者
论文摘要
由于极小的层厚度和层之间元素的严重混合，因此难以制造水窗范围内的有效多层光学元件。因此，适当的分析和简短的反馈回路对于制造商提高性能和效率至关重要。我们展示了使用四个现实生活中的CRSC多层样品使用商业实验室设备进行非破坏性元素深度分析的可能性。在同步加速器辐射设施Bessy II的PTB实验室的比较测量确认了结果，并证明了实验室设备的潜力，用于对具有亚纳米层厚度的分层材料可靠分析。
Efficient multilayer optics for radiation in the water window range are difficult to manufacture due to extremely small layer thicknesses and severe intermixing of elements between the layers. Therefore, adequate analytics and short feedback loops are of utmost importance for manufacturers to improve performance and efficiency. We show the possibility for non-destructive elemental depth profiling with commercial laboratory equipment using four real-life CrSc multilayer samples. Comparative measurements at the laboratory of PTB at the synchrotron radiation facility BESSY II confirm the results and prove the potential of laboratory equipment for the reliable analysis of stratified materials with sub-nanometer layer thicknesses.
