论文标题
使用多波长和多重角度的干扰确定薄膜的折射率,绝对厚度和局部斜率
Determining the refractive index, absolute thickness and local slope of a thin transparent film using multi-wavelength and multi-incident-angle interference
论文作者
论文摘要
我们使用多个入射角和多个波长来描述一种高速干涉方法,以测量绝对厚度,倾斜度,表面之间的局部角度以及波动透明楔的折射率。该方法非常适合生物,流体和工业应用。
We describe a high-speed interferometric method, using multiple angles of incidence and multiple wavelengths, to measure the absolute thickness, tilt, the local angle between the surfaces, and the refractive index of a fluctuating transparent wedge. The method is well suited for biological, fluid and industrial applications.