论文标题
通过加速电线流量在纳米级的3D相检索
3D Phase Retrieval at Nano-Scale via Accelerated Wirtinger Flow
论文作者
论文摘要
在各种科学领域，成像3D纳米结构在非常高的分辨率中至关重要。但是，由于光传播的基本局限性，我们只能通过3D标本的2D强度测量通过高度非线性投影映射来间接测量对象，在这些映射中，丢失了各种信息（包括阶段）。因此，重建涉及反转高度非线性且看似不可变的映射。在本文中，我们引入了一种新型技术，其中3D对象是从准确的非线性传播模型中直接重建的。此外，我们表征了该模型的歧义，并利用先验知识来减轻其效果，并显着减少所需的测量数量，从而减少收购时间。我们通过用于纳米级重建3D集成电路的数值实验来证明算法的性能。此外，我们提供了严格的理论保证，以融合平稳性。
Imaging 3D nano-structures at very high resolution is crucial in a variety of scientific fields. However, due to fundamental limitations of light propagation we can only measure the object indirectly via 2D intensity measurements of the 3D specimen through highly nonlinear projection mappings where a variety of information (including phase) is lost. Reconstruction therefore involves inverting highly non-linear and seemingly non-invertible mappings. In this paper, we introduce a novel technique where the 3D object is directly reconstructed from an accurate non-linear propagation model. Furthermore, we characterize the ambiguities of this model and leverage a priori knowledge to mitigate their effect and also significantly reduce the required number of measurements and hence the acquisition time. We demonstrate the performance of our algorithm via numerical experiments aimed at nano-scale reconstruction of 3D integrated circuits. Moreover, we provide rigorous theoretical guarantees for convergence to stationarity.
