论文标题
可靠的毫米波正常干涉仪
A Reliable Millimeter-Wave Quadrature Interferometer
论文作者
论文摘要
描述了一个简单的低成本毫米波（70 GHz）干涉仪，具有比Plus或Minur 2度更好的相准确度，并且描述了10 ns的响应时间。该干涉仪的简单性使其非常适合测量实验室或半导体处理等离子体中的电子密度。相对高精度和低成本由具有正交中间频率（IF）混合器的同源系统实现，现在以毫米波频带为商业可用。还描述了系统隔离器的磁屏蔽的设计和构造，也可能在磁性的等离子体周围需要。
A simple, low-cost millimeter-wave (70 GHz) interferometer with a phase accuracy better than plus or minur 2 degrees, and a response time of 10 ns is described. The simplicity of this interferometer makes it ideal for measurement of electron densities in laboratory or semiconductor processing plasmas. The relative high accuracy and low cost are attained by a homodyne system with a quadrature intermediate frequency (IF) mixer, now commercially available in millimeter-wave frequency bands. The design and construction of magnetic shielding for the system isolator, which may be required around magnetically-confined plasmas, is also described.
