论文标题
通过光刻在多孔硅制造的嵌入式波导结构
Embedded Waveguide Structures Fabricated in Porous Silicon by means of Lithography
论文作者
论文摘要
我们通过单个光孔掩模填充图案化的孔嵌入了氧化多孔硅（OPS）中嵌入的各种轻型引导结构的制造。 OP的毛孔填充了来自样品表面上的不饱和溶液中的KDP盐。使用光刻创建面具。创建的结构包括不同宽度的直，弯曲和锥形波导，以及Y裂片。在1.064微米的波长下证明了光引导和表征。
We report the fabrication of diverse light guiding structures embedded in oxidised porous silicon (OPS) by means of patterned pore filling through a single photoresist mask. The pores of OPS were filled with KDP salt from unsaturated solution applied on the sample's surface. Photolithography was used to create the mask. The created structures include straight, bent and tapered waveguides of different widths, and Y-splitters. Light guiding was demonstrated and characterised at wavelength of 1.064 microns.
